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谐振腔式ECR等离子体源装置以及方法
Release time:2021-07-24  Hits:

Affilication of Author(s): 中国科学技术大学

Disigner of the Invention: 张仲恺,leijiuhou,caojinxiang

Patent description: 发明公开

Application Number: 201910649890.1

Number of Inventors: 4

Service Invention or Not: no

Publication Date: 2019-09-13

First Author: liuyu