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谐振腔式ECR等离子体源装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 张仲恺,leijiuhou,caojinxiang
Patent description: 实用新型申请
Application Number: 201921134276.3
Number of Inventors: 4
Service Invention or Not: no
First Author: liuyu