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用于临近催化化学气相沉积的装置和方法
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,guoguangcan
Patent description: 发明
Application Number: 201711296987.6
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2018-05-18
First Author: guoguoping