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一种化学气相沉积系统
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description: 实用新型
Application Number: 201720306140.0
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2017-11-03
Authorization Date: 2017-11-03
First Author: guoguoping