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一种用于CVD固态源的挥发装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description: 实用新型
Application Number: 201720434437.5
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2018-01-30
Authorization Date: 2018-01-30
First Author: guoguoping