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一种用于CVD固态源的挥发装置
Release time:2021-07-24  Hits:

Affilication of Author(s): 中国科学技术大学

Disigner of the Invention: yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan

Patent description: 实用新型

Application Number: 201720434437.5

Number of Inventors: 6

Service Invention or Not: no

Publication Date: 2018-01-30

Authorization Date: 2018-01-30

First Author: guoguoping