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用于临近催化化学气相沉积的装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,guoguangcan
Patent description: 实用新型
Application Number: 201721700524.7
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2018-08-14
Authorization Date: 2018-08-14
First Author: guoguoping