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化学气相沉积设备
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description: 实用新型
Application Number: 201721380853.8
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2018-05-29
Authorization Date: 2018-05-29
First Author: guoguoping