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16 nm-resolution lithography using ultra-small-gap bowtie apertures
Release time:2021-10-27 Hits:
Journal: Nanotechnology
First Author: Yang Chen,Jin Qin
Correspondence Author: Jiaru Chu,Xianfan Xu,Liang Wang
Volume: 28
Issue: 5
Page Number: 055302
Translation or Not: no
Date of Publication: 2016-12-13
Included Journals: SCI
Links to published journals: https://iopscience.iop.org/article/10.1088/1361-6528/28/5/055302/meta