上一条：7、Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001

下一条：9、Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446