9、Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446
上一条：8、Influences of environmental humidity on micro object handling efficiency, Journal of Micromechanics and Microengineering,v 17, n 2, Feb 1, 2007, p 187-192
下一条：10、Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76,085104, 2005
