10、Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76,085104, 2005
上一条：9、Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446
下一条：11、A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004
