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[11]11、A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004.
[12]12、Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11.
[13]13、Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition; Sensors and Actuators A108(2003)，pp2-6.
[14]14、Effect of bottom electrodes on microstructures and electric properties of sol-gel derived Pb(Zr0.53,Ti0.47)O3 thin films, Thin Solid Films, 416(2002)，pp66-67.
[15]15、ESD method for Thick PZT film preparation, Jpn. J. Appl. Phys., Vol. 41(2002), Pt.1, No.6B，pp4317-4320.
[16]16、Novel multi-bridge structured piezoelectric micro-device for scanning force microscopy, J. Vac. Sci. Technol.B.18(6), pp. 3604-3607, Nov/Dec 2000.

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