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智能超高真空冷阴极电离规控制器

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:zhangyunwu,shengliusi,qifei,武国华

  • Patent description:实用新型

  • Application Number:98217148.X

  • Number of Inventors:5

  • Service Invention or Not:no

  • Publication Date:1999-09-08

  • Authorization Date:1999-09-08

  • First Author:gaohui

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