智能超高真空热阴极电离规控制器

Affilication of Author(s):中国科学技术大学

Disigner of the Invention:zhangyunwu,shengliusi,qifei,武国华

Patent description:实用新型

Application Number:98217153.6

Number of Inventors:5

Service Invention or Not:no

Publication Date:1999-09-29

Authorization Date:1999-09-29

First Author:gaohui