一种化学气相沉积系统
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description:发明
Application Number:201710188533.0
Number of Inventors:6
Service Invention or Not:no
Publication Date:2017-05-17
First Author:guoguoping
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