化学气相沉积设备、方法及用途
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description:发明
Application Number:201711005202.5
Number of Inventors:6
Service Invention or Not:no
Publication Date:2018-03-20
First Author:guoguoping
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