用于临近催化化学气相沉积的装置和方法
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:yanghui,Li Hai Ou,caogang,guoguangcan
Patent description:发明
Application Number:201711296987.6
Number of Inventors:5
Service Invention or Not:no
Publication Date:2018-05-18
First Author:guoguoping
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