洪义麟
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光栅离子束刻蚀的光学在线检测装置及检测方法
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: xuxiangdong,hongyilin,xudequan,fushaojun
Patent description: 发明
Application Number: 200710020220.0
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2008-09-10
Authorization Date: 2010-02-24
First Author: liuying