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具有双反射镜的直接计数式变栅距单光栅光位移传感器
Release time:2021-07-23  Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: fushaojun,hongyilin,xuxiangdong,liuying
Patent description: 发明
Application Number: 200710133593.9
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2008-03-05
First Author: liuzhengkun