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具有双反射镜的直接计数式变栅距单光栅光位移传感器
Release time:2021-07-23  Hits:

Affilication of Author(s): 中国科学技术大学

Disigner of the Invention: fushaojun,hongyilin,xuxiangdong,liuying

Patent description: 发明

Application Number: 200710133593.9

Number of Inventors: 5

Service Invention or Not: no

Publication Date: 2008-03-05

First Author: liuzhengkun