5、Shengzhou Huang, Mujun Li*, Lei Wang, Yongsheng Su and Yi Liang. A self-calibration method with high-accuracy and low-cost for large-area motion stage based on digital grating projection mode. Applied Physics Express, 12(12): 126503 (2019)
发布时间:2021-07-24
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- 上一条:4、Shengzhou Huang, Mujun Li*, Lei Wang, Yongsheng Su and Yi Liang.Precise fabrication of large-area microstructures by digital oblique scanning lithography strategy and stage self-calibration technique. Applied Physics Express, 12(9): 096501 (2019)
- 下一条:6、Tao Zhang, Mujun Li*, Jinfeng Qiu, Cuicui Shi, and Peng Chen, Multiple foci modulation with controllable positions and intensity ratios through decomposed optimization, Opt. Lett. 44, 2354-2357 (2019)