大口径光栅刻蚀技术研究
Release time:2021-07-24
Hits:
- Status:
- 进行
- Classification of Project:
- 预付合同
- Nature of Project:
- 横向项目
- Supported by:
- 企事业单位委托项目
- Project Number:
- KD1808020263
- Date of Project Approval:
- 2017-07-10
- Scheduled completion time:
- 2018-12-31
- Date of Project Initiation:
- 2018-07-10
- Subsidy Amount:
- 84.0
- Pre One:大口径介质膜光栅刻蚀技术研究
- Next One:BSG取样光栅研制


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