中文

刘正坤

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Degree:Dr

Patents

Current position: Home > Scientific Research > Patents

周腾 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种等离子体刻蚀装置及其扩散装置,201920083740.4,2019-08-27,2019-08-27.
陈智文 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种平面双角闪耀光栅的制作方法,201910574843.5,2019-09-17,
liuzhengkun ,林达奎,liuying,chenhuoyao,hongyilin,一种平面基底变间距光栅的线密度测试系统及测试方法,201910501496.3,2019-08-27,
周腾 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种等离子体刻蚀装置及其扩散装置,201910044200.X,2019-03-29,
chenhuoyao ,liuying,梁举曦,wangyu,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种用于强激光系统中具有亚波长光栅减反结构的光束采样光栅,201720561886.6,2018-05-29,2018-05-29.
liuying ,林达奎,chenhuoyao,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,抑制位相掩模垂直光栅矢量方向次生干扰的近场全息动态曝光方法,201710407545.8,2017-10-20,
chenhuoyao ,liuying,梁举曦,wangyu,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种用于强激光系统中光束采样光栅的增透减反方法,201710357385.0,2017-08-11,
张健 ,liuzhengkun,qiukeqiang,xuxiangdong,fushaojun,具有高衍射效率的大口径薄膜衍射元件的制作方法,201610688679.7,2016-11-23,2018-12-14.
liuying ,李媛芳,liuzhengkun,chenhuoyao,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种变间距光栅的近场全息-离子束刻蚀制备方法,201510988326.4,2016-03-16,2017-11-24.
wangyu ,liuzhengkun,qiukeqiang,郑衍畅,liuying,hongyilin,一种光栅掩模与硅片{111}晶面的对准方法,201510793828.1,2016-03-23,2018-08-03.

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