具有高衍射效率的大口径薄膜衍射元件的制作方法
Release time:2021-07-24
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- liuzhengkun,qiukeqiang,xuxiangdong,fushaojun
- Patent description:
- 发明
- Application Number:
- 201610688679.7
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2016-11-23
- Authorization Date:
- 2018-12-14
- First Author:
- 张健
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