刘正坤

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一种平面基底变间距光栅的线密度测试系统及测试方法

Release time:2021-07-24
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Affilication of Author(s):
中国科学技术大学
Disigner of the Invention:
林达奎,liuying,chenhuoyao,hongyilin
Patent description:
发明公开
Application Number:
201910501496.3
Number of Inventors:
5
Service Invention or Not:
no
Publication Date:
2019-08-27
First Author:
liuzhengkun