下架元件全口径修复验证-反应气体离子源技术方案
Release time:2021-07-24
Hits:
- Status:
- 进行
- Classification of Project:
- 预付合同
- Nature of Project:
- 横向项目
- Supported by:
- 企事业单位委托科技项目
- Project Number:
- KD1909230168
- Date of Project Approval:
- 2019-07-01
- Scheduled completion time:
- 2020-12-31
- Subsidy Amount:
- 15.0
- Pre One:BSG刻蚀研制
- Next One:空间滤波器透镜L3波带片研制


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