具有双反射镜的直接计数式变栅距单光栅光位移传感器
Release time:2021-07-23
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- fushaojun,hongyilin,xuxiangdong,liuying
- Patent description:
- 发明
- Application Number:
- 200710133593.9
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2008-03-05
- First Author:
- liuzhengkun
- Pre One:具有双反射镜的直接计数式变栅距单光栅光位移传感器


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