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位相型朗奇光栅槽深的光学检测方法
Release time:2021-07-23
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- fushaojun,liuzhengkun,xuxiangdong,hongyilin
- Patent description:
- 发明
- Service Invention or Not:
- no
- Publication Date:
- 2009-01-07
- Authorization Date:
- 2010-11-24
- First Author:
- liuying
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