刘正坤

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一种白光干涉位移传感器中楔形膜及其制作方法

Release time:2021-07-23
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Affilication of Author(s):
中国科学技术大学
Disigner of the Invention:
黄涛,qiukeqiang,xuxiangdong,fushaojun
Patent description:
发明
Application Number:
201210022543.4
Number of Inventors:
5
Service Invention or Not:
no
Publication Date:
2012-07-04
Authorization Date:
2014-09-24
First Author:
liuzhengkun