一种数字式波长编码光学绝对位移传感器
Release time:2021-07-23
Hits:
- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- qiukeqiang,wangyu,liuying,fushaojun
- Patent description:
- 实用新型
- Application Number:
- 201320435009.6
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2013-12-25
- Authorization Date:
- 2013-12-25
- First Author:
- liuzhengkun
- Pre One:一种顶角90°三角形槽阶梯光栅的制作方法
- Next One:一种工作在软X射线波段的并联平场光栅及其设计方法


中文
Login
