Zheng Jinjin
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基于准LIGA技术的MEMS制造误差修正方法
Release time:2021-07-24 Hits:
Teaching and Research Group: 精密机械与精密仪器系
Status: 完成
Note: 项目分类：基金委
Classification of Project: 面上项目
Nature of Project: 纵向项目
Supported by: 国家自然科学基金项目
Project Number: 60473133
Date of Project Approval: 2004-09-01
Scheduled completion time: 2007-12-01
Date of Project Completion: 2007-12-01
Date of Project Initiation: 2005-01-01
Project Approval Number: 60473133
Subsidy Amount: 24.0