亚大气压均匀直流辉光等离子体放电技术的研究
Release time:2021-07-24
Hits:
- Affiliation of Participant(s):
- 物理学院
- Teaching and Research Group:
- 近代物理系
- Status:
- 进行
- Nature of Project:
- 校级项目
- Project Level:
- School discipline
- Scheduled completion time:
- 2018-12-31
- Date of Project Initiation:
- 2017-01-01
- Project Approval Number:
- 2016
- Subsidy Amount:
- 12.09
- Pre One:等离子体化学气相沉积Si-B-N非晶陶瓷薄膜研究