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6、Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror, Sensors and Actuators,A: Physical, v 147, n 1, Sep 15, 2008, p 242-247
Release time:2021-07-25 Hits:
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5、Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech.Microeng.v19, 2009,035024
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7、Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001