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Paper Publications
MORE+- [1]1、Corrosion mechanism and surface passivation strategues of polycrystalline silicon electrodes.Sensors and Actuators A: Physical, 2010..
- [2]2、Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.,Microelectronic Engineering, 2010. 87(12): p. 2475-2481.
- [3]3、Research on the resolution of micro stereo lithography,Chinese Optics Letters, 2009. 7(8): p. 724-727.
- [4]4、Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505.
- [5]5、Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech.Microeng.v19, 2009,035024.
Patents
MORE+- [1]huhongzhuan ,wangjianping,刘志刚,zhouzengxiang,zhaichao,chujiaru,一种用于光谱天文望远镜的光纤定位单元及其限位装置,201921819103.5,
- [2]huhongzhuan ,wangjianping,刘志刚,zhouzengxiang,zhaichao,chujiaru,一种用于光谱天文望远镜的光纤定位单元的离焦补偿装置,201911023763.7,
- [3]huhongzhuan ,wangjianping,刘志刚,zhouzengxiang,zhaichao,chujiaru,一种用于光谱天文望远镜的光纤定位单元及其限位装置,201911023091.X,
- [4]huhongzhuan ,wangjianping,刘志刚,zhouzengxiang,zhaichao,chujiaru,光谱天文望远镜及其面阵光接收部件定位及方位调整装置,201921868851.2,
- [5]huhongzhuan ,wangjianping,刘志刚,zhouzengxiang,zhaichao,chujiaru,一种用于光谱天文望远镜的光纤定位单元的离焦补偿装置,201921819086.5,
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