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3、Research on the resolution of micro stereo lithography，Chinese Optics Letters, 2009. 7(8): p. 724-727
Release time:2021-07-25 Hits:
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2、Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.，Microelectronic Engineering, 2010. 87(12): p. 2475-2481
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4、Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505