褚家如
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·Paper Publications
- [1] 1、Corrosion mechanism and surface passivation strategues of polycrystalline silicon electrodes.Sensors and Actuators A: Physical, 2010..
- [2] 2、Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.，Microelectronic Engineering, 2010. 87(12): p. 2475-2481.
- [3] 3、Research on the resolution of micro stereo lithography，Chinese Optics Letters, 2009. 7(8): p. 724-727.
- [4] 4、Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505.
- [5] 5、Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech.Microeng.v19, 2009,035024.
- [6] 6、Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror, Sensors and Actuators,A: Physical, v 147, n 1, Sep 15, 2008, p 242-247.
- [7] 7、Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001.
- [8] 8、Influences of environmental humidity on micro object handling efficiency, Journal of Micromechanics and Microengineering,v 17, n 2, Feb 1, 2007, p 187-192.
- [9] 9、Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446.
- [10] 10、Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76,085104, 2005.