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锆钛酸铅铁电薄膜的湿法刻蚀方法
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 郑可炉,鲁健
Patent description: 发明
Application Number: 200310112618.9
Number of Inventors: 3
Service Invention or Not: no
Publication Date: 2004-11-17
Authorization Date: 2006-05-24
First Author: chujiaru