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并行探针驱动的扫描等离子体加工装置和加工方法
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 王海
Patent description: 发明
Application Number: 200510083423.5
Number of Inventors: 2
Service Invention or Not: no
Publication Date: 2006-02-08
Authorization Date: 2007-11-21
First Author: chujiaru