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一种压电厚膜驱动的微变形镜及其制备方法
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 许晓慧,wangxiang,zhaogang,冯艳,刘芳,liuyong,张晋弘
Patent description: 发明
Application Number: 200610167153.0
Number of Inventors: 8
Service Invention or Not: no
Publication Date: 2007-08-22
Authorization Date: 2009-01-21
First Author: chujiaru