用于临近催化化学气相沉积的装置
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:yanghui,Li Hai Ou,caogang,guoguangcan
Patent description:实用新型
Application Number:201721700524.7
Number of Inventors:5
Service Invention or Not:no
Publication Date:2018-08-14
Authorization Date:2018-08-14
First Author:guoguoping
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