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化学气相沉积设备

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan

  • Patent description:实用新型

  • Application Number:201721380853.8

  • Number of Inventors:6

  • Service Invention or Not:no

  • Publication Date:2018-05-29

  • Authorization Date:2018-05-29

  • First Author:guoguoping

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