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连通式多反应室高温有机金属化学气相淀积装置
Release time:2021-07-23
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- lixiaoguang,王秋来,刘世闯
- Patent description:
- 发明
- Application Number:
- 200410065874.1
- Number of Inventors:
- 4
- Service Invention or Not:
- no
- Publication Date:
- 2005-08-24
- First Author:
- 傅竹西
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