李晓光

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连通式多反应室高温有机金属化学气相淀积装置

Release time:2021-07-23
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Affilication of Author(s):
中国科学技术大学
Disigner of the Invention:
lixiaoguang,王秋来,刘世闯
Patent description:
实用新型
Application Number:
200420055041.2
Number of Inventors:
4
Service Invention or Not:
no
Publication Date:
2006-02-08
Authorization Date:
2006-02-08
First Author:
傅竹西