连通式多反应室高温有机金属化学气相淀积装置
Release time:2021-07-23
Hits:
- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- lixiaoguang,王秋来,刘世闯
- Patent description:
- 实用新型
- Application Number:
- 200420055041.2
- Number of Inventors:
- 4
- Service Invention or Not:
- no
- Publication Date:
- 2006-02-08
- Authorization Date:
- 2006-02-08
- First Author:
- 傅竹西
- Pre One:一种去除纳米氧化铝模板背面铝层的装置
- Next One:连通式多反应室高温有机金属化学气相淀积装置