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温晓镭

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Senior engineer  

Paper Publications

Helium Ion-Assisted Wet Etching of Silicon Carbide with Extremely Low Roughness for High-Quality Nanofabrication.

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Journal:Small Methods

Indexed by:Journal paper

Document Type:J

Volume:8

Issue:5

Page Number:2301364

Translation or Not:no

Date of Publication:2024-01-07

Included Journals:SCI

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