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温晓镭

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Senior engineer  

Paper Publications

High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field.

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Journal:Scientific Reports

Document Type:J

Translation or Not:no

Date of Publication:2015-09-03

Pre One:3-D Nanofabrication of Silicon and Nanostructure Fine-Tuning via Helium Ion Implantation.

Next One:Optical nanolithography with lambda/15 resolution using bowtie aperture array.

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