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温晓镭

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Senior engineer  

Paper Publications

Optical nanolithography with lambda/15 resolution using bowtie aperture array.

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Journal:Applied Physics A-Materials Science & Processing

Document Type:J

Translation or Not:no

Date of Publication:2014-01-30

Pre One:High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field.

Copyright © 2013 University of Science and Technology of China.

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