中国科学技术大学温晓镭--中文主页-- High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field.

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High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field.

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发表刊物：Scientific Reports
文献类型：J
是否译文：否
发表时间：2015-09-03

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